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NHC-3D-AFVI
· A real-time, ultra-high-speed and ultra-precise inspection system using a Line Confocal Scanner for bump height measurement
· Software that links defect images and coordinates with VRS
· Powerful inspection area editing software
※ Download related information below.
Content
Category |
Specification |
Remarks |
Camera Type |
Line Confocal Scan 1220 |
Negotiable |
Hight Resolution/ FOV |
50nm/11.6mm |
|
2D Optical Resolution |
6.7um |
|
Detection Defects |
Bump Height/ Diameter/ Missing/ Others |
Negotiable |
Scan Time |
Below 400um, 100mm/s |
Negotiable |
Defect Classification |
Powerful User Editing Features |
|
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