· Wafer Unit's height inspection system
· Measurement of wafer unit/dummy/chip height and inspect crack.
· Automatically create Wafer shapes with simple recipe input
· Wafer full height measurement with Line Confocal eliminates data loss area
· Acquiring Height Data Using 3D Line Confocal Module
· Height Over / Height Under detection using a height measurement algorithm
· Crack inspection at the same time as height measurement